R
2
Silicon Wafer Mapping Sensor
F3M-S
Allows Simultaneous Mapping of up
to 25 Silicon Wafers
H
Economical, one sensor detects most
wafer types, including dummy wafers
H Models match wafer sizes of 300 mm,
200 mm and 150 mm
H Automatic and remote teaching
capability
H Self-diagnostic functions reduce
downtime
Orderin Information
Applicable wafer size
Number of cassette slots
Function
Remarks
Part number
6 inches (4.76-mm pitch)
25
Self-diagnosis
---
F3M-S625
.
26
---
---
F3M-S626
8 inches (6.35-mm pitch)
25
Self-diagnosis
---
F3M-S825
.
26
---
---
F3M-S826
12 inches (10-mm pitch)
13
Self-diagnosis
CE marking
F3M-S1213
25
Self-diagnosis
CE marking
F3M-S1225
Application Examples
Detects Transparent Glass Wafers
with a Transparency of 92%
(F3M-S6j and F3M-S8j)
The F3M-S allows the mapping of cassettes that have both
silicon wafers and glass wafers. The F3M-S also accurately
detects dummy wafers in the carrier used to test coating or
processing tolerances.
Automatic Teaching Saves Setting Time
Remote Teaching Available
The F3M-S has an automatic teaching function that ensures easy
adjustments within a minimal time. The remote teaching function
allows quick, on-the-fly set up.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Note: The self-diagnostic output function is not incorporated by
the F3M-S826/-S626.
Static Electricity Protection
OMRONs optical system, including an emitter and receiver,
prevents Sensor malfunction and damage by protecting the
Sensor from static electricity that may be charged on
semiconductor wafers at the time of mapping.
发布紧急采购，3分钟左右您将得到回复。
相关PDF资料
F3M-S825-1
SENSOR COMB 8" WAFER 25 SLOTS
FIREFLY-TX-IPKIT
TX BELT CLIP/O-RING TO IP67
FLA01.07.0045A
ANT 5-BAND FLEX PCB W/CABLE
FPC-532-DC
POWER CABLE FUSED DC
FW.90.SMA.M
RF ANTENNA
FXP07.07.0100A
ANT 5-BAND FLEX PCB W/CABLE
FXP07.09.0100A
ANT 5-BAND FLEX PCB W/CABLE
FXP100.07.0100A
ANT WIDE-BAND WIMAX FLEX PCB
相关代理商/技术参数
F3MS625
制造商:OMRON AUTOMATION AND SAFETY 功能描述:SENSOR COMB 6" WAFER 25 SLOTS
F3M-S625
功能描述:传感器硬件与配件 Comb Sensor 25 TIER 6
RoHS:否 制造商:Honeywell 产品:Magnet Collar
F3MS626
制造商:OMRON AUTOMATION AND SAFETY 功能描述:SENSOR COMB 6" WAFER 26 SLOTS
F3M-S626
功能描述:传感器硬件与配件 Comb Sensor 26 TIER 6
RoHS:否 制造商:Honeywell 产品:Magnet Collar
F3MS825
制造商:OMRON AUTOMATION AND SAFETY 功能描述:SENSOR COMB 8" WAFER 25 SLOTS 制造商:Omron Electronic Components LLC 功能描述:Mapping Sensor 30-Pin 制造商:OMRON INDUSTRIAL AUTOMATION 功能描述:Mapping Sensor 30-Pin
F3M-S825
功能描述:传感器硬件与配件 Comb Sensor 25 SLOTS 8IN.WAFER
RoHS:否 制造商:Honeywell 产品:Magnet Collar
F3MS8251
制造商:OMRON AUTOMATION AND SAFETY 功能描述:SENSOR COMB 8" WAFER 25 SLOTS
F3M-S825-1
功能描述:传感器硬件与配件 Comb Sensor 25 SLOT 8 SPECIAL
RoHS:否 制造商:Honeywell 产品:Magnet Collar